A full-field compensation method for nonlinear phase error is proposed. By measuring the reference plane for multiple times, the accuracy of phase unwrapping on the reference plane can be efficiently improved. An expected phase plane approaching to the ideal values can be extracted from these multiple measured phases on the reference plane. This expected phase plane can be used to detect the nonlinear phase error. When reconstructing the measured object, the nonlinear phase error can be directly searched in the look-up table with the unwrapped phase of the object, then the full-field unwrapping phase of the object be compensated. By using the proposed method to reconstruct several height-known flat planes, the maximum mean absolute error (MAE) is decreased from 0.48 mm to 0.06 mm and the maximum root-mean-square error (RMSE) is decreased from 0.55 mm to 0.07 mm.