The short-wave ultraviolet (UVC) Raman spectrometer has the advantages of high Raman scattering intensity, weak fluorescence noise, and low background light noise. In order to realize the miniaturization of the UVC Raman spectrometer and extend its application fields, the key technologies of all solid-state 266 nm laser Raman spectrometer are studied. The diode pumped 266 nm solid-state laser is used as the excitation light source to effectively reduce the system volume and improve the system robustness. A solid-state spectrometer with Littrow structure is designed for obtaining the UVC Raman spectral signals, in which a single off-axis parabolic reflector is used as a collimating/focusing lens, and a plane grating with high line density is used as a dispersion element. The resolution in the band of 269--293.5 nm is better than 0.07 nm using a 50 μm slit, reaching the Raman spectral resolution requirement of 10 cm ^-1. A complete Raman spectrometer is built to test the Raman characteristic peak of ethyl alcohol with 99.8% mass fraction, and the feasibility and rationality of the above system is verified.