Laser & Optoelectronics Progress, Volume. 48, Issue 12, 120606(2011)
Fiber-Optic Tip Pressure Sensor Fabricated by 157 nm Laser
In order to improve the fabrication efficiency of micro fiber pressure sensors, an optical fiber sensor based on Fabry-Perot (F-P) interferometer fabricated by using 157 nm laser micromachining is proposed and demonstrated. The sensor head consists of a short air F-P cavity near the tip of a single-mode fiber and the fiber tip. Tracking the phase signal, the variation of pressure can be obtained. In the pressure measurement range of 0~60 MPa, the sensitivity and long-term stability of the sensor are 0.01 rad/MPa and ±0.04 MPa, respectively. For ten sensor samples tested, the tolerance of sensitivity of the sensors for 60 MPa measurement range is ±5%. This sensor has great potential to realize mass-production of good reproducibility and the application prospect in industry measurement is wonderful.
Get Citation
Copy Citation Text
Ni Min, Ran Zengling, Lu En, Rao Yunjiang. Fiber-Optic Tip Pressure Sensor Fabricated by 157 nm Laser[J]. Laser & Optoelectronics Progress, 2011, 48(12): 120606
Category: Fiber Optics and Optical Communications
Received: Jul. 8, 2011
Accepted: --
Published Online: Oct. 11, 2011
The Author Email: Min Ni (nimin1115@126.com)