Journal of Atmospheric and Environmental Optics, Volume. 1, Issue 1, 73(2006)
Experimental Study on AlGaAs Wet Oxidation Characteristics
The oxidation characteristics of high Al composition AlxGa1-xAs layer contained in the AlxGa1-xAs/GaAs materials are researched, by reaction with H2O vapor at temperature 400~500℃. Many factors are related with the procedure of oxidation, such as the Al composition, the thickness of AlxGa1-xAs layer,the reaction temperature and the carrier gas flow. The results show that the oxidation rate of AlxGa1-xAs layer is related to the Al concentration, the thickness of AlxGa1-xAs layer, the reaction temperature and the carrier gas flow.
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ZENG Li-na, ZHAO Ying-jie, ZHONG Jing-chang. Experimental Study on AlGaAs Wet Oxidation Characteristics[J]. Journal of Atmospheric and Environmental Optics, 2006, 1(1): 73