Acta Optica Sinica, Volume. 18, Issue 12, 1721(1998)
Response of Optic profiler to Spatial Wavelength of Optical Element Surface
The relation between roughness measuring of optical elements and the bandlimit response of the profiler used in the measuring is discussed. The analysis is based on a lot of data from the different samples. Some proposals are put forward for solving deviation induced by surface roughness measuring in different surface spatial wavelength scope using optic profiler.
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[in Chinese], [in Chinese], [in Chinese]. Response of Optic profiler to Spatial Wavelength of Optical Element Surface[J]. Acta Optica Sinica, 1998, 18(12): 1721
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