Laser & Optoelectronics Progress, Volume. 57, Issue 11, 111417(2020)
Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials
Microholes are extensively used as a common structure in various fields, including aviation, biology, chemical industry, and new energy. The femtosecond laser pulse possesses unique advantages with respect to drilling high-quality and high-aspect-ratio microholes owing to its ultrashort duration and ultrahigh peak intensity. In this study, the research progress of femtosecond laser microhole drilling on non-metallic materials and its applications in recent years, including the temporally/spatially shaped femtosecond laser pulse microhole drilling based on electron dynamic control, laser irradiation followed by chemical etching microhole drilling, vacuum environment microhole drilling, back-surface liquid-assisted microhole drilling, and environment-temperature-controlled microhole drilling, are reviewed. Furthermore, the challenges associated with the mechanisms and methodologies of femtosecond laser microhole drilling on non-metallic materials are analyzed.
Get Citation
Copy Citation Text
Kun Du, Xiaowei Li, Bingdong Yang, Chao Zhang, Bo Xia. Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111417
Category: Lasers and Laser Optics
Received: Mar. 20, 2020
Accepted: Apr. 27, 2020
Published Online: Jun. 2, 2020
The Author Email: Li Xiaowei (lixiaowei@bit.edu.cn)