Laser & Optoelectronics Progress, Volume. 57, Issue 11, 111417(2020)

Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials

Kun Du1, Xiaowei Li1、*, Bingdong Yang1, Chao Zhang1, and Bo Xia2
Author Affiliations
  • 1Laser Micro/Nano Fabrication Laboratory, School of Mechanical Engineering, Beijing Institute of Technology, Beijing 100081, China
  • 2College of Mechanical and Electrical Engineering, Shihezi University, Shihezi, Xinjiang 832000, China
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    Microholes are extensively used as a common structure in various fields, including aviation, biology, chemical industry, and new energy. The femtosecond laser pulse possesses unique advantages with respect to drilling high-quality and high-aspect-ratio microholes owing to its ultrashort duration and ultrahigh peak intensity. In this study, the research progress of femtosecond laser microhole drilling on non-metallic materials and its applications in recent years, including the temporally/spatially shaped femtosecond laser pulse microhole drilling based on electron dynamic control, laser irradiation followed by chemical etching microhole drilling, vacuum environment microhole drilling, back-surface liquid-assisted microhole drilling, and environment-temperature-controlled microhole drilling, are reviewed. Furthermore, the challenges associated with the mechanisms and methodologies of femtosecond laser microhole drilling on non-metallic materials are analyzed.

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    Kun Du, Xiaowei Li, Bingdong Yang, Chao Zhang, Bo Xia. Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111417

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Mar. 20, 2020

    Accepted: Apr. 27, 2020

    Published Online: Jun. 2, 2020

    The Author Email: Li Xiaowei (lixiaowei@bit.edu.cn)

    DOI:10.3788/LOP57.111417

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