Acta Optica Sinica, Volume. 27, Issue 11, 1997(2007)
Real-Time Surface Profile Measurement Using Sinusoidal Phase-Modulating Interferometry
A sinusoidal phase-modulating (SPM) interferometer for real-time surface profile measurement is proposed and analyzed. A laser diode and a high-speed image sensor are used as the light source and the photo detector. The phase corresponding to each measurement point on the surface is calculated by a signal processing circuit. The surface profile is obtained by the phase distribution . The interferometer is insensitive to vibrations of the optical components and fluctuations in the light source. The surface profile of an optical wedge was measured . For 60×60 measurement points, the measurement time was less than 8.2 ms. Repeatability in the measurements was 4.3 nm.
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[in Chinese], [in Chinese], [in Chinese]. Real-Time Surface Profile Measurement Using Sinusoidal Phase-Modulating Interferometry[J]. Acta Optica Sinica, 2007, 27(11): 1997