In order to improve the film thickness uniformity of the meniscus lens surface, the film thickness uniformity of the meniscus lens surface in the third-order common rotation planetary system is studied. The motion trajectory equation of the third-order common rotation planetary disk is constructed. According to the film thickness calculation formula, the relative film thickness distribution model of meniscus lens surface is established which is related to the dip and revolution radius of the third-order disk. The distribution model is verified experimentally by electron beam evaporation and ion beam assisted deposition. In addition, the structural parameters of the third-order common rotation planetary system are optimized according to the multi-experimental results to improve the film thickness uniformity of the meniscus lens surface. The experimental results show that when the rotation radius is 650 mm and dip is 60°, the film thickness uniformity of the convex surface of the meniscus lens can be controlled within ±2.45% without using the correction bezel technology.