Acta Photonica Sinica, Volume. 46, Issue 8, 823003(2017)

Design and Fabrication of O Band 8 Channel Flat-top Arrayed Waveguide Grating Based on Silica on Silicon

LI Chao-yi1,2、*, AN Jun-ming1,2, ZHANG Jia-shun1, WANG Liang-liang1, LI Jian-guang1, WANG Hong-jie1, WU Yuan-da1,2, YIN Xiao-jie1, and WANG Yue1
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  • 1[in Chinese]
  • 2[in Chinese]
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    An arrayed waveguide grating ,which is applied to IEEE 200/400 GbE standard 802.3 bs, is designed and manufactured. The arrayed waveguide grating uses the silica-on-silicon material, which has 2.0% ultra-high refractive index difference, making the less chip size and insertion loss. In addition, in order to obtain a flattened receiving spectrum, the output waveguides are widened and the multimode waveguide structures are used to excite a few of higher order modes. Several patterns are overlaid so that the top of the original Gaussian spectrum is flattened and forms a box-like receiving spectrum. At last, the designed center wavelength of the arrayed waveguide grating is 1 291.10 nm, the channel spacing is 800 GHz, and the device size is 11 mm×4 mm. The microchip is manufactured by plasma enhanced chemical vapor deposition and inductively coupled plasma etching. The test results show that, the minimum insertion loss is about -3.3 dB, the crosstalk between adjacent channels is less than -20 dB, and the single channel 1 dB bandwidth ranging from 2.12 nm to 3.06 nm, realizing a good wavelength demultiplexing and flattening effect, and having a certain practical value in the actual optical communication system.

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    LI Chao-yi, AN Jun-ming, ZHANG Jia-shun, WANG Liang-liang, LI Jian-guang, WANG Hong-jie, WU Yuan-da, YIN Xiao-jie, WANG Yue. Design and Fabrication of O Band 8 Channel Flat-top Arrayed Waveguide Grating Based on Silica on Silicon[J]. Acta Photonica Sinica, 2017, 46(8): 823003

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    Paper Information

    Received: Mar. 1, 2017

    Accepted: --

    Published Online: Oct. 30, 2017

    The Author Email: Chao-yi LI (lichaoyi@semi.ac.cn)

    DOI:10.3788/gzxb20174608.0823003

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