Laser & Optoelectronics Progress, Volume. 50, Issue 11, 111402(2013)
Research on Etching of Quartz Ceramic by Laser Beam
Attempts are made to research the laser etching of quartz ceramic. Ultraviolet (UV) laser and fiber laser are used in the etching of quartz ceramic. Step tester and scanning electron microscope (SEM) are used to test the samples processed by lasers. The information of depth, accuracy and microstructure is obtained through the test. The result shows that quartz ceramic can be processed by UV laser and fiber laser. Compared with traditional means, using laser etching, quasi-three-dimensional structures can be achieved and the etching depth and area can be controlled with higher accuracy. The etching quality and quantity have a close relationship with the laser pulse, scanning speed and other parameters. The difference between photochemical and photothermal effect is the main factor leading to the different results of UV laser and fiber laser.
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Kong Lingrui, Zhang Fei, Duan Jun, Zeng Xiaoyan. Research on Etching of Quartz Ceramic by Laser Beam[J]. Laser & Optoelectronics Progress, 2013, 50(11): 111402
Category: Lasers and Laser Optics
Received: May. 30, 2013
Accepted: --
Published Online: Sep. 17, 2013
The Author Email: Lingrui Kong (13163387792@163.com)