Acta Optica Sinica, Volume. 16, Issue 10, 1350(1996)
Study of Diffraction Efficiency of Binary Optics Elements with Layer by Layer Analysis Method
A new method named Layer by Layer Analysis Method was presented to analyze the diffraction efficiency of binary optical elements. To four step binary optical elements, the effects of fabrication errors, such as depth and alignment errors, on the diffraction efficiency were investigated in detail. It was shown that this method is very convenient and effective to the analysis of diffraction efficiency of binary optical elements with alignment errors.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Diffraction Efficiency of Binary Optics Elements with Layer by Layer Analysis Method[J]. Acta Optica Sinica, 1996, 16(10): 1350