In the research of all-solid dual-chamber synchronization and output energy stability of laser power supply system, two sets of all-solid fast discharge power are provided in the system for the excimer laser with the MOPA structure whose synchronization jitter is less than 5 ns and pulsed frequency equals 4000 Hz. Based on EMP570T100C3, a CPLD device, a digitally programmable delay unit is designed, and the implementation method is verified by simulation and experiment to meet the project design requirement.