Optoelectronics Letters, Volume. 15, Issue 5, 335(2019)

The property research of the transmission sinusoidal grating with fabrication of LIGA process

Yu-ting WANG1...2, Bo WANG1, Fu-ting YI1,*, Tian-chong ZHANG1, Jing LIU1, and Xiao-xiao LIANG12 |Show fewer author(s)
Author Affiliations
  • 1Beijing Synchrotron Radiation Facility, Institute of High Energy Physics, Beijing 100049, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    The transmission sinusoidal grating (TSG) shows a different diffraction pattern with conventional black-white transmission grating (BWTG), which can focus the diffraction energy on a higher order and has been widely used in the spectrum instruments. According to the description of the scalar diffraction theory, the numerical simulation for diffraction properties of the TSG has been studied for years. However, the fabrication of the TSG is difficult and seldom reported. In this article, a TSG is designed and an approach of the X-ray LIGA process is used to fabricate the TSG and the device can obtain the brightest diffraction peaks at the ±1 order with the zero-order diffraction peak unobvious on the background for a certain wavelength of the incident light.

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    WANG Yu-ting, WANG Bo, YI Fu-ting, ZHANG Tian-chong, LIU Jing, LIANG Xiao-xiao. The property research of the transmission sinusoidal grating with fabrication of LIGA process[J]. Optoelectronics Letters, 2019, 15(5): 335

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    Paper Information

    Received: Dec. 8, 2018

    Accepted: Jan. 18, 2019

    Published Online: Jan. 7, 2020

    The Author Email: Fu-ting YI (yift@ihep.ac.cn)

    DOI:10.1007/s11801-019-8176-4

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