Chinese Optics Letters, Volume. 7, Issue 12, 1113(2009)

Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm

Invited Paper
Author Affiliations
  • Joonku Hahn, Hwi Kim, Yongjun Lim, Eun-Hee Kim, and Byoungho Lee*
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    We propose a novel spatial phase-shifting interferometry that exploits a genetic algorithm to compensate for geometric errors. Spatial phase-shifting interferometry is more suitable for measuring objects with properties that change rapidly in time than the temporal phase-shifting interferometry. However, it is more susceptible to the geometric errors since the positions at which interferograms are collected are different. In this letter, we propose a spatial phase-shifting interferometry with separate paths for object and reference waves. Also, the object wave estimate is parameterized in terms of geometric errors, and the error is compensated by using a genetic algorithm.

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    Invited Paper. Spatial phase-shifting interferometry with compensation of geometric errors based on genetic algorithm[J]. Chinese Optics Letters, 2009, 7(12): 1113

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    Paper Information

    Received: Jul. 13, 2009

    Accepted: --

    Published Online: Dec. 18, 2009

    The Author Email:

    DOI:10.3788/COL20090712.1113

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