Acta Optica Sinica, Volume. 19, Issue 10, 1361(1999)

Optimization of the Wavelength Scanning F-P Interferometer

[in Chinese]1, [in Chinese]1, and [in Chinese]2
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  • 1[in Chinese]
  • 2[in Chinese]
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    The phase errors, resulting from the multi-beam interference in the Fabry-Perot cavities of the wavelength scanning fiber-optic interferometer for absolute distance measurement, are analyzed. It′s proved that selecting the suitable reflectivities of two F-P cavities and the length of the reference cavity can reduce the phase errors. In authors′ system, the optimal cavity reflectivity is in the range of 0.10~0.15 and the reference cavity length is about 0.95 mm, the accuracy of 0.05 μm can be obtained in the range of 1 mm.

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    [in Chinese], [in Chinese], [in Chinese]. Optimization of the Wavelength Scanning F-P Interferometer[J]. Acta Optica Sinica, 1999, 19(10): 1361

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jun. 22, 1998

    Accepted: --

    Published Online: Aug. 9, 2006

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