Acta Photonica Sinica, Volume. 31, Issue 10, 1252(2002)
CALIBRATION OF THE NON-LINEARITY OF PIEZO ELEMENTS AND IMAGE DISTORTION IN ATOMIC FORCE MICROSCOPE
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[in Chinese], [in Chinese]. CALIBRATION OF THE NON-LINEARITY OF PIEZO ELEMENTS AND IMAGE DISTORTION IN ATOMIC FORCE MICROSCOPE[J]. Acta Photonica Sinica, 2002, 31(10): 1252
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