Acta Photonica Sinica, Volume. 32, Issue 8, 973(2003)
Study of Nanometer Scale Thickness Testing Method of Film Based On The White-light Interferometry
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Nanometer Scale Thickness Testing Method of Film Based On The White-light Interferometry[J]. Acta Photonica Sinica, 2003, 32(8): 973