Laser & Optoelectronics Progress, Volume. 57, Issue 10, 100002(2020)

Review of Multi-Wavelength Digital Holography Metrology

Yuemeng Zhang, Ping Cai*, Jun Long, and Hao Yan
Author Affiliations
  • School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
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    Holding advantages including high accuracy, non-contact measurement, and full-filed measurement, single-wavelength digital holographic systems are generally used for the measurement of micro-scale objects with continuous morphology. Developed from dual-wavelength interferometry techniques, multi-wavelength digital holographic systems can measure objects with complex shapes and larger scales, which extends the application range of digital holographic metrology. In recent years, there are two main research topics in multi-wavelength digital holography area. First, many types of measurement methods and/or optical setup according to realistic requirements are proposed; in addition, enhancement are achieved in image processing techniques such as noise reduction algorithm, numerical reconstruction and phase aberration compensation to improve the computational efficiency and result accuracy.

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    Yuemeng Zhang, Ping Cai, Jun Long, Hao Yan. Review of Multi-Wavelength Digital Holography Metrology[J]. Laser & Optoelectronics Progress, 2020, 57(10): 100002

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    Paper Information

    Category: Reviews

    Received: Sep. 17, 2019

    Accepted: Oct. 12, 2019

    Published Online: May. 8, 2020

    The Author Email: Cai Ping (pcai@sjtu.edu.cn)

    DOI:10.3788/LOP57.100002

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