As a typical nano-insulating material, SiO2 nanomaterial has quantum size limitations. Combined with the unique photoelectric characteristics of different elements, the effect is widely used in biomedicine and nanodevice-integrated electronics. With the advent of the scientific era, the research results are increasing daily. The research work of rare earth-doped nano-luminescent materials is gradually launched. Its broad application scope includes information display, laser materials, optical fiber communication, and fluorescence detection. Sm3+ is an important rare earth oxide ion material. It has potential applications in solar cells, nanoelectronic devices, semiconductor glass, biochemical sensors, and nanomagnets. In this experiment, Sm3+ doped SiO2 nanorods were successfully prepared by thermal evaporation. Characterization tests using scanning electron microscopy, X-ray diffraction, and Raman scattering spectroscopy revealed that Sm3+ doped SiO2 nanorods have a tetragonal crystal structure. With the decrease of deposition temperature, the diameter of the nanorod increases, the deposition density decreases, and the morphology of the sample changes from a nanorod-like structure to a micro-particle gradually; after doping, the diffraction of the SiO2 lattice shifts to a small angle, the lattice constant increases, and the cell volume increases. The growth process of Sm3+ doped SiO2 nanorods was not affected by metal catalysts. Under saturated vapor pressure, gaseous SiO2 will deposit on substrate regions with different temperatures along the direction of carrier gas flow. Regions with higher temperatures tend to deposit and nucleate preferentially. In the low-temperature region, the oxygen diffusion driving force decreases, and the nucleation growth opportunity decreases, inhibiting the growth of one-dimensional nanostructures and making it easier to form nanoparticles. The synthesis of Sm3+ doped SiO2 nanorods follows a gas-solid (VS) growth mechanism. An analysis of the optical performance of Sm3+ doped SiO2 nanorods by UV and PL tests found that the doping affected the light absorption of SiO2 is blue-shifted, and the corresponding band gap is increased by 0.7～0.8 eV. Different from traditional SiO2 nano/micron material, Sm3+ doped SiO2 transferred energy to Sm3+ after being stimulated by radiation, and the material showed a Sm3+ characteristic luminescence performance. This study has important guiding significance for applying SiO2 materials in optical information.