Frontiers of Optoelectronics, Volume. 2, Issue 1, 86(2009)

Laser micro-cladding electronic pastes for fabrication of MIM thick film capacitors

Yu CAO, Xiangyou LI, and Xiaoyan ZENG*
Author Affiliations
  • School of Optoelectronics and Engineering, Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
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    Two direct-write processing methods - direct material deposition by microPen and Nd:YAG laser microcladding - are integrated with computer-aided design/computer-aided manufacturing (CAD/CAM) technology for the fabrication of passive electronic components. A basic two-step procedure of the laser micro-cladding electronic paste (LMCEP) process for thick film pattern preparation is presented. In particular, metal-insulatormetal (MIM) type thick film capacitors are fabricated on ceramic substrates by the LMCEP process. Multilayer structures of the MIM thick film capacitors are demonstrated and discussed. Results of the frequency characteristics test show that the MIM thick film capacitors fabricated by the LMCEP process have excellent direct current (DC) voltage stability (<2.48%), excellent frequency stability (<2.6%) and low dissipation factor (<0.6%), which are sufficient for many megahertz applications.

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    Yu CAO, Xiangyou LI, Xiaoyan ZENG. Laser micro-cladding electronic pastes for fabrication of MIM thick film capacitors[J]. Frontiers of Optoelectronics, 2009, 2(1): 86

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    Paper Information

    Received: Jul. 9, 2008

    Accepted: Oct. 5, 2008

    Published Online: Oct. 8, 2012

    The Author Email: ZENG Xiaoyan (xyzeng@mail.hust.edu.cn)

    DOI:10.1007/s12200-009-0008-x

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