Acta Optica Sinica, Volume. 39, Issue 9, 0934001(2019)

Surface Measurement of Angel Lobster Eye X-Ray Lens Based on Fringe Reflection

Shikun Zhang1, Longhui Li1、*, Jianning Sun1,2, Ge Jin1, Yan Gu1, Feng Lü1, Zhen Zhang1, Bowen Jiang1, Zhao Xu1, Tuo Chen1, Yidai Liao1, Youli Guo5, Zhixing Ling3,4, and Chen Zhang3,4、**
Author Affiliations
  • 1 North Night Vision Technology Co. Ltd, Nanjing, Jiangsu 211106, China
  • 2 Science and Technology on Low-Light-Level Night Version Laboratory, Xian, Shaanxi 710065, China
  • 3 National Astronomical Observatories, Chinese Academy of Sciences, Key Laboratory of Space Astronomy and Technology, Chinese Academy of Sciences, Beijing 100012, China
  • 4 College of Astronomy and Space Science, University of Chinese Academy of Sciences, Beijing 100049, China
  • 5 Dalian Jianying Optical Technology Co. Ltd, Dalian, Liaoning 116023, China
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    A fringe reflection measurement system with simple structure is developed to measure the surface of an angel lobster eye X-ray lens, and it is easy to operate. First, a fringe reflection image of the lobster eye lens whose size is 40 mm×40 mm is taken by a charged coupled device camera, and the slope error distribution of the lens surface is calculated. The root mean square (RMS) and peak-to-valley (PV) values of the lobster lens obtained by the fringe reflection measurement system are 0.81 μm and 6.34 μm, respectively. The measurement results of the proposed system are consistent with those of the Zygo interferometer. The standard deviations of the RMS and PV values obtained by repeated surface measurements are 0.017 μm and 0.11 μm, respectively. The feasibility of the fringe reflection measurement system for measuring the surface of an angel lobster eye X-ray lens is verified. Then, the X-ray focus imaging simulation is performed for the measurement of the surface error of the lobster eye lens based on the Monte Carlo method. The full width at half maximum of the diffuse focal spot caused by the surface error is approximately 0.23 mm, and the corresponding angular resolution is 2.11'. This optical measurement system provides a reference for the spherical forming of the lobster eye lens.

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    Shikun Zhang, Longhui Li, Jianning Sun, Ge Jin, Yan Gu, Feng Lü, Zhen Zhang, Bowen Jiang, Zhao Xu, Tuo Chen, Yidai Liao, Youli Guo, Zhixing Ling, Chen Zhang. Surface Measurement of Angel Lobster Eye X-Ray Lens Based on Fringe Reflection[J]. Acta Optica Sinica, 2019, 39(9): 0934001

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    Paper Information

    Category: X-Ray Optics

    Received: Mar. 4, 2019

    Accepted: May. 8, 2019

    Published Online: Sep. 9, 2019

    The Author Email: Li Longhui (bnullh@163.com), Zhang Chen (chzhang@nao.cas.cn)

    DOI:10.3788/AOS201939.0934001

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