Chinese Journal of Lasers, Volume. 46, Issue 9, 904006(2019)

Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference

Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, and Lin Qiang
Author Affiliations
  • Center for Optics and Optoelectronics Research, College of Science, Zhejiang University of Technology, Hangzhou, Zhejiang 310023, China
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    A micro-displacement measurement system is established based on transmissive laser air-wedge interference. The system realizes displacement measurement in one dimension with nanometer resolution. We use an image processing method, applying an extra small displacement and calculating the light intensity difference, to extract the interference patterns buried in stray light and noise, and effectively improve the signal-to-noise ratio of the laser interferometric images. Results show that the relative displacement resolution of the system is better than 10 nm and the absolute displacement measurement uncertainty is better than 5%. The measuring system is compact in structure, easy to install and use, and the measuring resolution reaches the nanometer level. It realizes fast, convenient and stable measurement, and is suitable for temporary demand of high resolution and precision displacement measurements.

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    Wang Zixuan, Ji Cong, Wang Jing, Yang Gang, Wang Xiaolong, Lin Qiang. Precision Displacement Measurement with Nanometer Resolution Based on Transmissive Laser Air-Wedge Interference[J]. Chinese Journal of Lasers, 2019, 46(9): 904006

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    Paper Information

    Category: Measurement and metrology

    Received: Apr. 2, 2019

    Accepted: --

    Published Online: Sep. 10, 2019

    The Author Email:

    DOI:10.3788/CJL201946.0904006

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