Acta Optica Sinica, Volume. 4, Issue 10, 946(1984)

A new type of automatic ellipsometer

XIB BEIXING
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  • [in Chinese]
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    In this paper, we describe a new electro-optical compensated automatic ellipsome-ter. The design principles are discussed in detail and the measurement results on SiO2 film are given. A new type of automatic spectrum-ellipsometer may be developed based on it.

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    XIB BEIXING. A new type of automatic ellipsometer[J]. Acta Optica Sinica, 1984, 4(10): 946

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    Paper Information

    Category: Thin Films

    Received: Jan. 30, 1984

    Accepted: --

    Published Online: Sep. 15, 2011

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