Laser & Optoelectronics Progress, Volume. 59, Issue 10, 1000001(2022)

Research Progress of Imaging Ellipsometry

Yu Zhang, Jie Lian*, Mingyang Wei, Qingfen Jiang, Chenlin Wang, Yueming Wang, and Zhen Xu
Author Affiliations
  • Shandong Key Laboratory of Laser Technology and Application, School of Information Science and Engineering, Shandong University, Qingdao 266235, Shandong , China
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    Imaging ellipsometry is a measurement technology developed using traditional ellipsometry combined with imaging technology to adapt to the small and precise trends of various devices and materials. With the rapid development of nanotechnology, the technology has shown a trend of rapid developments and a wide range of applications in many fields, such as materials science, biology, and semiconductor. In this paper, we introduce the principle, advantages, and disadvantages of this technology. Furthermore, we comb the development history and describe the application progresses of this technology in material science and biomedicine, while discussing developing trends of this technology. This study hopes to serve as a review article on ellipsometric imaging technology and help promote the development of the technology and its application in more fields.

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    Yu Zhang, Jie Lian, Mingyang Wei, Qingfen Jiang, Chenlin Wang, Yueming Wang, Zhen Xu. Research Progress of Imaging Ellipsometry[J]. Laser & Optoelectronics Progress, 2022, 59(10): 1000001

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    Paper Information

    Category: Reviews

    Received: Mar. 19, 2021

    Accepted: Jun. 2, 2021

    Published Online: May. 16, 2022

    The Author Email: Lian Jie (lianjie@sdu.edu.cn)

    DOI:10.3788/LOP202259.1000001

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