Laser & Optoelectronics Progress, Volume. 59, Issue 10, 1000001(2022)
Research Progress of Imaging Ellipsometry
Imaging ellipsometry is a measurement technology developed using traditional ellipsometry combined with imaging technology to adapt to the small and precise trends of various devices and materials. With the rapid development of nanotechnology, the technology has shown a trend of rapid developments and a wide range of applications in many fields, such as materials science, biology, and semiconductor. In this paper, we introduce the principle, advantages, and disadvantages of this technology. Furthermore, we comb the development history and describe the application progresses of this technology in material science and biomedicine, while discussing developing trends of this technology. This study hopes to serve as a review article on ellipsometric imaging technology and help promote the development of the technology and its application in more fields.
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Yu Zhang, Jie Lian, Mingyang Wei, Qingfen Jiang, Chenlin Wang, Yueming Wang, Zhen Xu. Research Progress of Imaging Ellipsometry[J]. Laser & Optoelectronics Progress, 2022, 59(10): 1000001
Category: Reviews
Received: Mar. 19, 2021
Accepted: Jun. 2, 2021
Published Online: May. 16, 2022
The Author Email: Lian Jie (lianjie@sdu.edu.cn)