A new structure design and preparation method of structure-decoupled quadruple mass gyroscope are proposed. Design of comb electrode and push-pull method are used to eliminate the second harmonic component of the electrostatic driving force, and the structure of folding beam is simulated, analyzed and optimized to effectively realize the structural decoupling of drive mode and sense mode. According to the structure of the gyroscope, a feasible process plan was designed and the practical processing was carried out. Samples of the quadruple mass gyroscope were finally made by using SOI and anode bonding process. Simulation results show that the resonant frequency difference between drive mode and sense mode is 7Hz, which means the structure is highly symmetrical. Through the harmonic analysis, the maximum displacement of gyroscope is 1290nm, the maximum displacement difference of driving frame is 60.75nm, and the maximum displacement of detection frame is 305.24nm, which means that the ideal decoupling effect is obtained.