Chinese Journal of Quantum Electronics, Volume. 38, Issue 4, 428(2021)

Low loss superconducting coplanar waveguide resonator based on aluminum film

Yuzhen ZHENG1、*, Bojie ZHU1, Biao WU1, Yongdan HUANG1, Jian CHEN1, Rong HUANG1, Junyi SUN1, Haolin JIA2, Jun GU2, Kanglin XIONG1,2, Jiagui FENG1,2, and Hui YANG1,2
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  • 2[in Chinese]
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    To develop useful superconducting quantum systems, the quality of qubits needs to be improved furthermore. At present, defects in materials and their interfaces are important factors affecting the coherence time of qubits. As an important part of superconducting quantum chip, microwave resonator can be used to characterize the quality of materials and the fabrication process of devices. Using molecular beam epitaxy technology, aluminum is deposited on intrinsic silicon (111) substrate to prepare the λ/4 coplanar waveguide resonators. By the preparation of silicon substrate and the deposition of high quality aluminum films, the intrinsic qualityfactor of the resonator is improved to 106 at 20 mK with the probing power at near single-photon level.


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    ZHENG Yuzhen, ZHU Bojie, WU Biao, HUANG Yongdan, CHEN Jian, HUANG Rong, SUN Junyi, JIA Haolin, GU Jun, XIONG Kanglin, FENG Jiagui, YANG Hui. Low loss superconducting coplanar waveguide resonator based on aluminum film[J]. Chinese Journal of Quantum Electronics, 2021, 38(4): 428

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    Paper Information


    Received: Mar. 1, 2021

    Accepted: --

    Published Online: Sep. 1, 2021

    The Author Email: Yuzhen ZHENG (

    DOI:10.3969/j.issn.1007-5461. 2021.04.004


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