Acta Optica Sinica, Volume. 40, Issue 20, 2005001(2020)
Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens
The influence of different manufacturing errors on focusing performance of large-scale super-oscillatory lens (SOL) is revealed through a quantitative study for practical use based on rigorous vector angular spectrum theory. Theoretical calculation results show that the influence of the manufacturing errors on focusing performance of amplitude-type SOL (metallic film) and phase-type SOL (dielectric layer) is the same; central position deviation mainly affects the focusing focal length, while the width deviation mainly influences the focal spot distribution; the position and width deviations within the range of ±150 nm are the maximum allowable manufacturing tolerances for each SOL ring belt. Longitudinal etching depth deviation mainly affects the focused intensity of the phase-type SOL. When the relative phase difference introduced by the etching depth is π, the focused intensity reaches its maximum. To maintain a greater focused intensity, phase modulation should be kept within the range of 0.8π--1.2 π.
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Tao He, Tao Liu, Kang Liu, Guoqing Li, Jiayi Wang, Bo Tian, Shuming Yang. Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens[J]. Acta Optica Sinica, 2020, 40(20): 2005001
Category: Diffraction and Gratings
Received: May. 22, 2020
Accepted: Jul. 6, 2020
Published Online: Sep. 30, 2020
The Author Email: Liu Tao (liu8483@xjtu.edu.cn), Yang Shuming (liu8483@xjtu.edu.cn)