Acta Optica Sinica, Volume. 40, Issue 20, 2005001(2020)

Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens

Tao He, Tao Liu*, Kang Liu, Guoqing Li, Jiayi Wang, Bo Tian, and Shuming Yang*
Author Affiliations
  • State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, Shaanxi 710049, China
  • show less

    The influence of different manufacturing errors on focusing performance of large-scale super-oscillatory lens (SOL) is revealed through a quantitative study for practical use based on rigorous vector angular spectrum theory. Theoretical calculation results show that the influence of the manufacturing errors on focusing performance of amplitude-type SOL (metallic film) and phase-type SOL (dielectric layer) is the same; central position deviation mainly affects the focusing focal length, while the width deviation mainly influences the focal spot distribution; the position and width deviations within the range of ±150 nm are the maximum allowable manufacturing tolerances for each SOL ring belt. Longitudinal etching depth deviation mainly affects the focused intensity of the phase-type SOL. When the relative phase difference introduced by the etching depth is π, the focused intensity reaches its maximum. To maintain a greater focused intensity, phase modulation should be kept within the range of 0.8π--1.2 π.

    Tools

    Get Citation

    Copy Citation Text

    Tao He, Tao Liu, Kang Liu, Guoqing Li, Jiayi Wang, Bo Tian, Shuming Yang. Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens[J]. Acta Optica Sinica, 2020, 40(20): 2005001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Diffraction and Gratings

    Received: May. 22, 2020

    Accepted: Jul. 6, 2020

    Published Online: Sep. 30, 2020

    The Author Email: Liu Tao (liu8483@xjtu.edu.cn), Yang Shuming (liu8483@xjtu.edu.cn)

    DOI:10.3788/AOS202040.2005001

    Topics