Acta Optica Sinica, Volume. 16, Issue 4, 531(1996)
Preliminary Investigation of a Schwarzschild Microscopical System at 18.2 nm
The design, construction and imaging experiments of a soft X-ray normalincidence multilayer imaging Schwarzschild microscopical system with 10. 5 ×magnification at 18. 2 nm are presented. The resolution limited by abberration and diffractions less than 0. 2 μm. Multilayer Mo/Si coatings were deposited simultaneously onto both mirrors of Schwarzschild objective. The period of multilayer and number of layers are 9. 5 nm and 41, respectively. The images of 20 pl/mm and 55 pl/mm mesh were taken with laser produced with this imaging microscopic system.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Preliminary Investigation of a Schwarzschild Microscopical System at 18.2 nm[J]. Acta Optica Sinica, 1996, 16(4): 531