Acta Optica Sinica, Volume. 11, Issue 1, 71(1991)
A novel integral lensed InGaAsP/InP DH LED and ion-beam milling technigue
We report the results of fabrication of integral lensed GaInAsP LED by using ion-beam milling technigue firstty in China. Baking a positive acting photoresist layer was found to facilitate a very reproducible method of forming a spherical mask suitable for ion-beam milling. Characteristics of Ar ion-beam milling of InP and mask was studied, and milling parameters are optimized for obtaining optically smooth etched surfaces.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. A novel integral lensed InGaAsP/InP DH LED and ion-beam milling technigue[J]. Acta Optica Sinica, 1991, 11(1): 71
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