To clearly measure the surface topography of specimen and the relationship among specimens, a multi-scale measurement method based on Digital Micromirror Device (DMD) was proposed, and then a control method and measurement strategy of DMD were researched.Without any changes of measurement device, the parameters of structured light based on DMD could be controlled by software programming.Theoretically, different scale measurement for surface topography, from 0.1 μm level to 1 mm level, could be achieved.A multi-scale measurement device based on DMD has been set up, and the experiment results indicate that, the axial accuracy and transverse resolution of the device could achieve at 1μm level, and the microstructure could be scanned quickly.This multi-scale measurement method could be widely applied in surface topography measurement to solve some multi-scale problems.