Optoelectronics Letters, Volume. 8, Issue 3, 190(2012)

Design and fabrication of a novel high damage threshold HfO2/TiO2/SiO2 multilayer laser mirror

Zeng-you MENG, Sha-ling HUANG, Zhe LIU, Cheng-hang ZENG, and Yi-kun BU*
Author Affiliations
  • Department of Electronic Engineering, Xiamen University, Xiamen 361005, China
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    This paper describes a new method to design a laser mirror with high reflectivity, wide reflection bandwidth and high laserinduced damage threshold. The mirror is constructed by three materials of HfO2/TiO2/SiO2 based on electric field and temperature field distribution characteristics of all-dielectric laser high reflector. TiO2/SiO2 stacks act as the high reflector (HR) and broaden the reflection bandwidth, while HfO2/SiO2 stacks are used for increasing the laser resistance. The HfO2/ TiO2/SiO2 laser mirror with 34 layers is fabricated by a novel remote plasma sputtering deposition. The damage threshold of zero damage probability for the new mirror is up to 39.6 J/cm2 (1064 nm, 12 ns). The possible laser damage mechanism of the mirror is discussed.

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    MENG Zeng-you, HUANG Sha-ling, LIU Zhe, ZENG Cheng-hang, BU Yi-kun. Design and fabrication of a novel high damage threshold HfO2/TiO2/SiO2 multilayer laser mirror[J]. Optoelectronics Letters, 2012, 8(3): 190

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    Paper Information

    Received: Oct. 26, 2011

    Accepted: --

    Published Online: Jul. 12, 2017

    The Author Email: Yi-kun BU (buyikun139@163.com)

    DOI:10.1007/s11801-012-1149-5

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