Within the limit of fabricating techniques,2000 l /mm self-standing transmission gratings model was designed. And by combining the techniques of electronic-beam lithography and X-ray lithography,the 2000 l /mm X-ray self-standing transmission gratings was fabricated. Firstly,the electronic-beam lithography and micro-electroplating technology was used to prepare a master mask of gratings on polyimide membrane substrate. Then by using X-ray lithography and micro-electroplating,child gratings was replicated on the master mask. And the self-standing graph was transferred to the daughter gratings via utraviolet (U-V) lithography and micro-electroplating. Finally,with the technology of etching and inductively coupled plasma (ICP),the fabrication of X-ray self-standing transmission gratings was fulfilled. From the fabrication results of the gratings,it shows that bars smoothness,the absent ratio and the profile of the gratings are all desired.