Optics and Precision Engineering, Volume. 12, Issue z1, 318(2004)
Technical research of Si3N4 film in SiH2Cl2-NH3-N2 system prepared by LPCVD
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[in Chinese], [in Chinese]. Technical research of Si3N4 film in SiH2Cl2-NH3-N2 system prepared by LPCVD[J]. Optics and Precision Engineering, 2004, 12(z1): 318
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