Acta Optica Sinica, Volume. 30, Issue 1, 127(2010)
Cyclic Radial Shearing Interferometry Based on Polarization Phase-Shifting Technique
The cyclic radial shearing interferometry, which can be used to obtain the information of tested wavefront by only one interferogram, is suitable for dynamic wavefront measurements. Simultaneous phase-shifting technique which is convenient for interferogram processing, is adopted. Based on the cyclic radial shearing interferometry, one original interferogram is divided into four interferograms which have π/2 phase-shifting interval simultaneously by using a 2-dimentional orthogonal grating and polarization phase-shifting method. And the wavefront of the test piece is recovered with the 4-bucket algorithm and iteration method. The feasibility of the cyclic radial shearing interferometry based on polarization phase-shifting is validated by theoretical formula derivation, simulation analysis and primary experimental testing, the result shows that RMS precision is better than λ/100. Furthermore, the means with diffraction grating splitter and polarization phase-shifting, which is anti-vibration, not only can be used to overcome the disadvantage of complicated single interferogram processing, but also can be propitious to improve the ability of anti-disturbance of radial shearing interferometry.
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Kong Meimei, Gao Zhishan, Chen Lei, Xu Chunsheng. Cyclic Radial Shearing Interferometry Based on Polarization Phase-Shifting Technique[J]. Acta Optica Sinica, 2010, 30(1): 127
Category: Instrumentation, Measurement and Metrology
Received: Oct. 12, 2008
Accepted: --
Published Online: Feb. 1, 2010
The Author Email: Meimei Kong (kongmm2004@163.com)