Optics and Precision Engineering, Volume. 23, Issue 8, 2243(2015)
Precision grinding of micro V-groove array on optical fiber quartz glass substrate
As quartz glass is hard to be micro-machined, a self-researched truing technique of diamond wheel micro-tip was utilized to develop the grinding technique of micro V-groove arrays on the quartz glass. The influences of profile errors of 60° micro V-grooves on the coupling losses of optical fibers were analyzed. Then, the error compensation truing for grinding wheel micro-tip was researched. Finally, the grinding accuracy for micro V-grooves on quartz glass was experimentally investigated. The theoretical analysis indicates that when the angle, interval and the width of micro V-groove range ±0.42°, ±1.04 μm and ±1.2 μm, respectively, the coupling loss is less than 0.5 dB. The experimental results show that the Numerical Control( NC) precise grinding technique proposed can machine higher precise arrays, and the the V-tip angle and the radius of trued diamond wheel may reach 10.46 μm and (60±0.22)° by NC path and angle compensation truing, respectively. After micro-grinding of quartz glass, the micro V-groove shows an angle error of 0.4°, a tip radius of 10.5 μm, a width error of 0.3 μm and an interval error of 0.5 μm, which assures the precision connection of optical fiber arrays.
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XIE Jin, FENG Yan-ke, CHENG Jian, WU Ke-ke. Precision grinding of micro V-groove array on optical fiber quartz glass substrate[J]. Optics and Precision Engineering, 2015, 23(8): 2243
Received: Jan. 3, 2015
Accepted: --
Published Online: Oct. 22, 2015
The Author Email: Jin XIE (jinxie@scut.edu.cn)