Optics and Precision Engineering, Volume. 28, Issue 2, 398(2020)

Design of flexure micro-gripper precision-driven by piezoceramics

WU Zhi-gang* and CHEN Min
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  • [in Chinese]
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    A flexible micro-gripper system was developed to realize the precision clamping of micro-or Nano-sized objects. The design, kinematics, dynamics, and control methods of the flexible micro-gripper were studied. First, a flexible micro-gripper was designed by using a flexure hinge design method, and a Pseudo Rigid Body (PRB) model was established by using a PRB method. Moreover, the kinematic models of the system, for example, the mechanical amplification ratio and input stiffness, were established using the PRB model. Furthermore, the dynamic equation of the system was established by the Lagrange method, and the natural vibration frequencies of the system were obtained. Finally, the ANSYS finite element method was used to simulate and verify the model of the system. Additionally, a PID control algorithm was used to control the micro-gripping system. The experimental results show that the tracking control error is 2.4%, and the magnification ratio is 9.12. The system performs the micro-clamping function on the micro-or Nano-scale, and its total precision can reach the micron level or Nano-level. The micro-gripper meets the design requirements in several studies.

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    WU Zhi-gang, CHEN Min. Design of flexure micro-gripper precision-driven by piezoceramics[J]. Optics and Precision Engineering, 2020, 28(2): 398

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    Paper Information

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    Received: Jun. 14, 2019

    Accepted: --

    Published Online: May. 27, 2020

    The Author Email: Zhi-gang WU (wzgang2017@163.com)

    DOI:10.3788/ope.20202802.0398

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