Optics and Precision Engineering, Volume. 10, Issue 3, 271(2002)
Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on the structure design of a precision stage based on magnetic levitation technology and used in micro-electron manufacturing field[J]. Optics and Precision Engineering, 2002, 10(3): 271
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