Acta Optica Sinica, Volume. 28, Issue 6, 1151(2008)

Design and Simulation Analysis of a Micro Optical Switch

Li Wei1,2、*, Liang Jingqiu1, Li Xiaoqi1,2, Zhong Yanchao1,2, Liang Zhongzhu1, and Sun Degui1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    A new polyimide (PI)-cantilever MEMS optical switch of electromagnetic actuation is proposed, and the structure of the optical switch is designed and simulated. The optimal dimension of the permanet magnet is designed and the structure of the PI-cantilever is optimized by finite element method. The relation of restoring force and electromagnetic force versus the displacement of the cantilever is interpreted. With 75 mA current pulse input,the distance of PI-cantilever equation is about 1.02 mm, which is able to change the propagation direction of the optical beam between through state and reflection state.

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    Li Wei, Liang Jingqiu, Li Xiaoqi, Zhong Yanchao, Liang Zhongzhu, Sun Degui. Design and Simulation Analysis of a Micro Optical Switch[J]. Acta Optica Sinica, 2008, 28(6): 1151

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Oct. 29, 2007

    Accepted: --

    Published Online: Jun. 6, 2008

    The Author Email: Wei Li (liwei211@163.com)

    DOI:

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