Acta Optica Sinica, Volume. 38, Issue 2, 0205002(2018)
Micro-Angle Measurement Based on Two-Dimensional Moire Fringes Generated by Square Aperture Micro-Lens Array
A micro-angle measurement method based on the two-dimensional moire fringes generated by square aperture micro-lens array and micro-graphic array is proposed. The variation principle of the moire fringe pitch formed by these arrays with different sizes is analyzed. The expression of small rotation angle is deduced. The theoretical analysis and experimental measurement are carried out on the relationship between the moire fringe pitch and the included angle of arrays. The research results show that, when the graphic element size of the micro-graphic array is shorter than the lens element size of the micro-lens array, the moire fringe pitch changes gently and is sensitive to the variation of the included angle θ between micrographics and microlens array, which is helpful for the improvement of the measurement accuracy. When the graphic element size is 0.3 mm and the lens element size is 0.4 mm, the experimental result on the relationship between the pitch and the included angle θ is basically consistent with the theoretical one.
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Sanchao Zheng, Sumei Zhou, Gaokun Huang, Xiaoming Yang. Micro-Angle Measurement Based on Two-Dimensional Moire Fringes Generated by Square Aperture Micro-Lens Array[J]. Acta Optica Sinica, 2018, 38(2): 0205002
Category: Diffraction and Gratings
Received: Jul. 31, 2017
Accepted: --
Published Online: Aug. 30, 2018
The Author Email: Zhou Sumei (sumeizhou@163.com)