Acta Optica Sinica, Volume. 20, Issue 6, 843(2000)
Measuring Method for Topography of DOE Based on Dual-Path Two-Wavelength Phase Shifting Interferometric Microscopy
The surfaces of diffraction optical element (DOE) are often deep and discontinuous, which lead to some difficulties for measurement of the 3-D surface topography of DOE. The generalized two-wavelength interferometry and a new data processing method are proposed, which effectively overcome the difficulties. Based on these techniques, a new measuring system has been set up with existing conditions. The system′s longitudinal resolution is 0.5 nm, the transversal resolution about 0.5 μm(NA=0.4), the measuring accuracy within the whole longitudinal measuring range is better than 1.3 nm.
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[in Chinese], [in Chinese], [in Chinese]. Measuring Method for Topography of DOE Based on Dual-Path Two-Wavelength Phase Shifting Interferometric Microscopy[J]. Acta Optica Sinica, 2000, 20(6): 843