Chinese Optics Letters, Volume. 4, Issue 4, 04247(2006)
ZrO2 films with variable refractive index by glancing angle deposition
When optical film is deposited at oblique angle incidences, the film becomes porously, and the film effective refractive index will decrease. Six porous ZrO2 films are fabricated by the glancing angle deposition (GLAD) technique with the different incidence angles. By changing the substrate tilt angle from 0 to 85 degrees, the film refractive index varies from 1.92 to 1.27.
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Xiaoyong Fu, Sumei Wang, Degang Deng, Kui Yi, Jianda Shao, Zhengxiu Fan. ZrO2 films with variable refractive index by glancing angle deposition[J]. Chinese Optics Letters, 2006, 4(4): 04247