Acta Optica Sinica, Volume. 34, Issue s1, 112007(2014)
Development of Precision One-Dimensional Adjustment Worktable Based on Aerostatic Bearing Technology
To achieve the high-precision one-dimensional adjustment of large surface under test in optical and mechanical measurements, a novel worktable based on the aerostatic bearing technology is developed. In the worktable, pitch or tilting motion is achieved by a cambered surface of aerostatic bearing and micro-displacement actuators, and the relationship between the angle of one-dimensional adjustment and the displacement of actuators is analyzed. Furthermore, by using an electronic autocollimator, the resolution of one-dimensional adjustment worktable is measured. Errors of the one-dimensional adjustment system are analyzed and the performance evaluation of the system is given. The experimental results show that the worktable has a pitch or tilting adjustment resolution of 1.2″, adjustment range of ±1° and good stability with 50 kg load. The developed one-dimensional adjustment worktable can satisfy the requirements of higher precision, high resolution, large adjustment range, frictionless, high load stiffness, stabilization and small driving force.
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Hou Maosheng, Ji Lin, Liu Entao, Tian Yanrong, Ma Fei, Zhao Weiqian. Development of Precision One-Dimensional Adjustment Worktable Based on Aerostatic Bearing Technology[J]. Acta Optica Sinica, 2014, 34(s1): 112007
Category: Instrumentation, Measurement and Metrology
Received: Jan. 22, 2014
Accepted: --
Published Online: Jul. 22, 2014
The Author Email: Maosheng Hou (houmsh@126.com)