The silicon-on-insulator diaphragm structure is a combined structure of the silicon dioxide and silicon layer. This work presents a new method to estimate the deflection response of silicon with that of a silicon-on-insulator (SOI) diaphragm structure, based on the burst pressure design approach. It also evaluates the output voltage of the diaphragm under two different conditions, flipped and un-flipped. The new modified analytical model developed and presented in this paper for describing the load deflection of SOI diaphragm is able to predict the deflection accurately when compared with the results obtained by finite element analysis CoventorWare.

A simple, low-cost, and home-built electrostatic spray deposition (ESD) system with the stable cone-jet mode was used to deposit nickel oxide (NiO) thin films on glass substrates kept at temperature of 400 ℃ as the primary precursor solution of 0.1 M concentration hydrated nickel chloride was dissolved in isopropyl alcohol. Electrical measurements showed that these films were of n-type conductivity while their resistance response to hydrogen flow in air ambient was varied by 2.81% with the rise and recovery time of 48 s and 40 s, respectively.

This paper proposes a polarization multiplexed interrogation technique for fiber Bragg grating (FBG) sensor array. The novelty of the proposed model is its ability to reduce interference and cross talk, thus allowing larger number of FBG sensors to be interrogated in an array. The calibration technique has been illustrated in this work for the FBG sensor array, where data from each sensor are linearly polarized and multiplexed before co-propagation, to find out the tapping points that enable identification of each sensor data uniquely. Simulation has been carried out for odd number and even number of sensors in an array. Even with interfering input, this proposed scheme can interrogate and distinctively identify each sensor data using appropriate tuning of polarization-splitter, polarization-rotator, and polarization-attenuator at the detector end during the calibration process. The significance of the proposed method is its compact size, which makes this calibration system ready to be deployed in real-time sensing applications and data acquisition from the FBG sensor array.

This article introduces the fabrication technology processes of the capacitive pressure sensor based on the low temperature co-fired ceramic (LTCC) material. Filling the cavity with different materials as a sacrificial layer is mainly discussed, and two different materials are chosen in the fabrication. It is found that the cavity filled with polyimide expands largely during sintering, while carbon ESL49000 material filled is more preferable to keep the cavity flat. Finally, the structure leaving without an air evacuation channel is designed and tested in a built-up pressure environment, the frequency measured decreases approximately linearly with the pressure applied, which proves the design leaving no air evacuation channel advisable.

Weak signal detection for single-mode fiber-optic distributed temperature sensor (DTS) is a key technology to achieve better performance. A hybrid technique combining the incoherent optical frequency domain reflectometry (IOFDR) and the three-channel simultaneous radio-frequency (RF) lock-in amplifier (LIA) is presented to improve the signal-to-noise ratio (SNR) of the measured spontaneous Raman backscattered light. The field programmable gate array (FPGA) based RF-LIA is designed with a novel and simple structure. The measurement frequency range is achieved from 1 kHz to 100 MHz. Experimental results show that the backscattered light signal of picowatt level can be detected with high SNR. With a 2.5 km single-mode fiber, a 1064 nm laser source, and the measurement time of 500 s, this sensing system can reach a spatial resolution of 0.93 m and a temperature resolution of about 0.2℃.

A new approach utilizing effects of dispersion in the high-order-mode fibers (HOMFs) to effectively discriminate changes in environmental temperature and axial strain is proposed and experimentally demonstrated. Experimental characterization of a HOMF-based fiber modal interferometer with a sandwich fiber structure exhibits excellent agreements with numerical simulation results. A Fourier transform method of interferometry in the spatial frequency domain is adopted to distinguish mode coupling between different core-guided modes. Distinct phase sensitivities of multiple dispersion peaks are extracted by employing a novel phase demodulation scheme to realize dual-parameter sensing.

This paper reports on the writing of long period gratings (LPGs) in a six-ring pure silica solid core, and large mode area photonic crystal fiber (fiber core diameter = 10.1 μm) using a CO2 laser system, and the characterization of their strain and temperature sensitivities. Temperature and strain sensitivities in the order of –19.6 pm/℃ and –88 pm/μm, respectively, were obtained, which were comparable or surpassed values of the similar photonic crystal fiber (PCF)-based LPG or sensor configurations found in the literature.

An optical akinetic swept source (AKSS) at 1060 nm, comprising a 5 m length fiber ring cavity, a semiconductor optical amplifier (SOA) as gain medium, and a 98% reflective chirped fiber Bragg grating as a dispersive element, is described. Active mode-locking was achieved by directly modulating the current of the SOA with sinusoidal signal of frequency equal to 10 times and 20 times the cavity resonance frequency. In the static regime, linewidths as narrow as 60 pm and a tuning bandwidth of 30 nm were achieved, while a 2 mW output power, without any optical booster, was measured dynamically at a sweep speed of 100 kHz. The axial range of the AKSS was evaluated by scanning through the channeled spectrum of a Mach-Zehnder interferometer.

In this study, the fabrication and characterization of capacitive humidity sensors using cobalt-phthalocyanine (CoPc) as the active material were presented. Thin films of CoPc were deposited by drop casting on glass substrates with pre-deposited aluminum electrodes to form Al/CoPc/Al surface-type humidity sensors. The effect of humidity on the electrical properties of the CoPc film was investigated by measuring capacitance and resistance of the samples at four different frequencies of the applied voltage. It was observed that the capacitance of the sensor increased while the resistance decreased with raising the relative humidity. It was also found that the values of capacitance and resistance decreased with increasing frequency. The optical absorption spectra and optical band gap energy of CoPc films were measured. The structure of CoPc powder and thin films has been studied by X-ray diffraction (XRD), scanning electron microscopy (SEM), and atomic force microscopy (AFM). Results of XRD studies show that the film structure is polycrystalline with the monoclinic structure while thin films have a peak for annealing temperatures with (100) orientation. Also, the surface morphology (grain size and roughness) for CoPc films have been studied by AFM.

A pressure tactile sensor based on the fiber Bragg grating (FBG) array is introduced in this paper, and the numerical simulation of its elastic body was implemented by finite element software (ANSYS). On the basis of simulation, fiber Bragg grating strings were implanted in flexible silicone to realize the sensor fabrication process, and a testing system was built. A series of calibration tests were done via the high precision universal press machine. The tactile sensor array perceived external pressure, which is demodulated by the fiber grating demodulation instrument, and three-dimension pictures were programmed to display visually the position and size. At the same time, a dynamic contact experiment of the sensor was conducted for simulating robot encountering other objects in the unknown environment. The experimental results show that the sensor has good linearity, repeatability, and has the good effect of dynamic response, and its pressure sensitivity was 0.03 nm/N. In addition, the sensor also has advantages of anti-electromagnetic interference, good flexibility, simple structure, low cost and so on, which is expected to be used in the wearable artificial skin in the future.

A fabrication method of the multi-wavelength fiber grating (FBG) was introduced. Using the scan exposure method, the multi-wavelength FBG can be successfully manufactured through applying different tensile forces during the multiple exposures process on the same fiber. Experiment results show that the position and the overlap of different sub FBGs will greatly affect the spectrum of every sub FBG. The spectrum of each sub FBG will be affected by short wave oscillation unless the lengths and positions of all sub FBGs are fully overlapped. For hydrogen loaded fiber, the wavelength and reflectivity of the nth level FBG will increase as the (n+1)th level FBG is written. But for germanium doped photosensitive fiber, multiple exposure will increase the wavelength of previous sub FBGs while decrease the reflectivity of all sub FBGs. Through well distributing exposure intensity of every sub FBGs, a four-wavelength FBG with same sub FBG’s spectrum was fabricated on a hydrogen loaded single mode fiber.

A large dynamic index measurement range (n =1 to n = 1.7) using surface plasmon resonance (SPR) shifts was demonstrated with a ZnSe prism at 632.8 nm, limited by the available high index liquid hosts. In contrast to borosilicate based SPR measurements, where angular limitations restrict solvent use to water and require considerable care dealing with Fresnel reflections, the ZnSe approach allows SPR spectroscopies to be applied to a varied range of solvents. An uncertainty in angular resolution between 1.5° and 6°, depending on the solvent and SPR angle, was estimated. The refractive index change for a given glucose concentration in water was measured to be n = (0.114 ± 0.007) /%[C6H12O6]. Given the transmission properties of ZnSe, the processes can be readily extended into the mid infrared.

Optical fiber vibration is detected by the coherent optical time domain reflection technique. In addition to the vibration signals, the reflected signals include clutters and noises, which lead to a high false alarm rate. The “cell averaging” constant false alarm rate algorithm has a high computing speed, but its detection performance will be declined in nonhomogeneous environments such as multiple targets. The “order statistics” constant false alarm rate algorithm has a distinct advantage in multiple target environments, but it has a lower computing speed. An intelligent two-level detection algorithm is presented based on “cell averaging” constant false alarm rate and “order statistics” constant false alarm rate which work in serial way, and the detection speed of “cell averaging” constant false alarm rate and performance of “order statistics” constant false alarm rate are conserved, respectively. Through the adaptive selection, the “cell averaging” is applied in homogeneous environments, and the two-level detection algorithm is employed in nonhomogeneous environments. Our Monte Carlo simulation results demonstrate that considering different signal noise ratios, the proposed algorithm gives better detection probability than that of “order statistics”.