[1] [1] Kuo J T W, Yu L, Meng E. Micromachined thermal flow sensors—A review[J]. Micromachines, 2012, 3(3): 550-573.

[4] [4] Cerimovic S, Talic A, Beigelbeck R. Bidirectional micromachined flow sensor featuring a hot film made of amorphous germanium[J]. Measurement Science and Technology, 2013, 24(8): 084002.

[5] [5] Yarali M, Khanna S K. Microfabrication of a variable range and multi-directionally sensitive thermal flow sensor[J]. Sensors and Actuators A: Physical, 2014, 220: 159-167.

[6] [6] Kohl F, Beigelbeck R, Loschmidt P. FEM-based analysis of micromachined calorimetric flow sensors[C]// IEEE, Sensors, 2006: 1215-1218.

[7] [7] Talic A, Cerimovic S, Beigelbeck R. FEM-analysis of 2D micromachined flow transduers based on aGe-thermistor arrays and a double bridge readout[J]. Sensors (Basel), 2019, 19(16): 3561.