Semiconductor Optoelectronics, Volume. 44, Issue 2, 175(2023)
Fabrication and Testing of MEMS Velocity Sensor Based on Self-Heating Amorphous Germanium Thermistors
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ZHAO Weiliang, CUI Feng. Fabrication and Testing of MEMS Velocity Sensor Based on Self-Heating Amorphous Germanium Thermistors[J]. Semiconductor Optoelectronics, 2023, 44(2): 175
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Received: Jan. 2, 2023
Accepted: --
Published Online: Aug. 14, 2023
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