In order to investigate influence of the substrate temperature and distance on diamond-like carbon (DLC) films in the pulsed laser deposition (PLD), firstly the temperature was kept at 200
C to deposit DLC film when the graphite target located at 25.0 mm and 30.0 mm from substrate respectively, secondly the temperature was kept at 400
C to deposit DLC film when the graphite target located at 25.0 mm and 30.0 mm from substrate respectively. The microstructure of DLC films was detected by the visible Raman spectroscopy. The topography of DLC films was detected by the atomic force microscopy (AFM). The experimental result demonstrates that ratio of sp3/sp2 and the density of DLC film decrease and size and number of graphitic crystallites increase when the temperature or distance increases. The smaller is the distance, the bigger is the influence of temperature on the microstructure of DLC film. The lower is the temperature, the bigger is the influence of the distance on the microstructure. The distance and temperature should influence topography of DLC film obviously.