Based on the modified couple stress theory and Hamilton principle, and combining the classical laminated beam theory, the motion control equations and natural frequencies of micro scale homogeneous and heterogeneous PZT intelligent drivers with laminated structure are derived in considering the mechanical electrical coupling effect. By introducing the intrinsic feature size parameters of materials, the size effect of the micro scale PZT drivers is successfully captured. The numerical analysis results show that different substrate materials have little influence on the normalized natural frequency of micro scale homogeneous and heterogeneous PZT intelligent actuators. With the increase of the thickness of substrate layer, the size effect of micro scale PZT drivers decrease gradually as the thickness of the piezoelectric layer does not change. With the increase of feature size of the PZT structure, the size effect gradually disappears.