In order to solve the problem that Bulk Acoustic Wave (BAW) filter and the test instrument cannot be directly tested due to different interface forms, an on board test fixture for BAW filter is designed in this paper. Firstly, the thickness parameter of the dielectric substrate of the test fixture was preliminarily determined according to the experience formula,and the initiallength and width of the micro strip transmission line of the test fixture were calculated by the tool LineCaclin ADS. Secondly, the TDR transient simulation circuit was established in ADS to study the impedance mismatching of micro strip line, and the methods to solve the mismatching were presented. And then, the initial structural parameters of the designed fixture were imported into ADS for checking the impedance matching. Finally threeBAW filters with different center frequency were selected as the device under test (DUT) respectively to do the on wafer probe and the on board fixture test. Three comparisons of S12 on board vs S12 on wafer,S12 on board vs S21 on board,S11 on board vs S22 on board were carried out according to the test results of the scattering parameter matrix parameters(S11、S12、S21、S22) curves of the same filter. The comparison resultsshow that the whole test curve of on board fixture test is slightly offset fromthat on wafer probe test, but the trend of the whole curve is consistent, the S12 S21 and S11 S22 curves of the on board test areall in good agreement.The on board fixture test results can provide a reliable initial value for subsequent de embedding calibration.

This paper describes the development of ultra wideband and very low loss SAW filter based on the large electromechanical coupling coefficient Love wave mode, a Cu electrode/15°YX LiNbO3 structure was employed as a substrate. The design adopts the modified coupled mode model for accurate simulation and simulated annealing algorithm for the optimization of resonator parameters. The width/length weighted dummy electrodes were used to suppress spurious responses caused by the transverse mode resonances, and a viscous film was coated on the filter surface which is effective in suppress a spurious dip caused by Rayleigh mode. A filter with the center frequency of 620 MHz, -1 dB fractional bandwidth of 14.9%, -3 dB bandwidth of 18.3%, insertion loss of 0.94 dB, and out of band rejection of higher than 40 dB was fabricated.

Based on a novel surface acoustic wave (SAW) one port resonator, a SAW Staphylococcus aureus (S. aureus) biosensor was designed and fabricated. This sensor adopted a resonator structure with a built in sensitive area in the middle of the interdigital transducer(IDT). Firstly, we analyzed the response mechanism of SAW biosensor according to the perturbation theory. Then, by combining the coupling of modes (COM) theory, the frequency response curve of the resonator was obtained. The measured results of the network analyzer showed that the frequency response curve of SAW resonator was consistent with the simulation result, and the resonator had the advantage of high quality factor. This structure was used for preliminary detection of Staphylococcus aureus in the experiment, and the linearity of the detection results was good, which laid a foundation for the next step of realizing the specific real time detection of S. aureus by SAW sensors.

A high precision surface acoustic wave measuring instrument based on FPGA equal precision frequency measurement and automatic gain control(AGC) circuits is designed. The measuring instrument collects the sound wave through the surface acoustic wave sensor and converts it into an electric signal and limits and shapes the signal through the AGC circuit and the Schmitt trigger to convert it into a square wave of the measurable frequency. Finally, the frequency measurement circuit is realized by the FPGA frequency measuring circuit, and the result is transmitted to the single chip microcomputer for display. The test results show that the instrument can measure the signal frequency in the frequency range of 100 Hz~100 kHz. The maximum measurement error of the system is 12%, the frequency range is wide, the precision is high, and the stability is good.

The physical implementation of quantum gates with high fidelity is one of the key technologies of quantum computation and quantum communication. Based on the circuit quantum electrodynamics and circuit quantum acoustodynamics theory, a quantum gate scheme composed of two superconducting transmon qubits with long coherence time and a film bulk acoustic wave resonator (FBAR) with high mechanical quality factor is proposed in this paper. The bulk acoustic resonator acts as a microwave photon channel, which enables quantum state exchange between two transmon qubits. In this paper, the equivalent circuit of bulk acoustic resonator is analyzed by the Butterworth Van Dyke model, and the quantized Hamiltonian of the system is constructed, then the quantum state of the system is encoded in the form of two level atom phonon mixed quantum state. The input state of the system is controlled by adjusting the external magnetic field, and the output state of the system can be obtained by the measurement module. Under the Jaynes Cummings model, the system can complete quantum iSWAP gate operation with high fidelity.

A fine step frequency synthesis method based on double loop system is proposed to solve the integer sideband spur problem of fractional frequency division phase lock. According to the working principle of variable reference to suppress fractional frequency integer sideband spurs, a fine step frequency synthesis system is formed by cascading a first order integer frequency division phase locked loop(PLL) and a first order fractional frequency division PLL. The N frequency division and M parameters of the integer PLL are adjusted through software algorithms, and finally the full frequency band spurs index is optimized. A broadband (bandwidth：4 8 GHz) fine step (1 kHz) frequency synthesizer is designed according to the proposed method. The measured spurs is better than 75 dBc, phase noise is better than -96 dBc/Hz at 1 kHz, and frequency hopping time is less than 47 μs.

A combined compensation scheme for passive vibration isolation and active acceleration compensation is designed to improve the deterioration of dynamic phase noise of crystal oscillator. In this solution, a two stage rubber shock absorber is used to realize good passive vibration isolation and optimize the dynamic phase noise of crystal vibration beyond 300 Hz. At the same time, the active acceleration electric compensation method is utilized to make up the resonance problem of the passive vibration isolation system at the near end (about 220 Hz), and the dynamic phase noise of 10~200 Hz is optimized. The results of the vibration experiment show that the combined compensation method can optimize the dynamic phase noise of crystal oscillator by 15~35 dB from the range of 10 Hz to 2 000 Hz away from the carrier.

A high precision amplitude and phase modulation mechanism(APMM) with the advantages of high reliability, high linear amplitude and phase characteristics and fast design is described in this paper. Through the cascading test, the consistency of the phase difference between channels of any multi channel module is ±1°, the amplitude consistency between any functional units is less than ±1 dB, the phase consistency is ±1.5°, the absolute delay accuracy of any functional unit is ±1.5 ps, and the amplitude flatness of multiple frequency relative bandwidths is ±1 dB. This APMM can be applied to any electronic system，any channelized design，any functional circuit or chip design. Through a large number of engineering applications, it has been confirmed that the scheme has effectively and reliably improved the amplitude and phase characteristics of various RF systems or modules.

The quartz micro electro mechanical system (MEMS) gyroscope is a kind of Coriolis vibrating gyros. Its sensitive chip adopts a tuning fork structure, which is in a resonant state during operation. The sensitive chip has multiple modes, and the first nine modes cover the frequency from 3 kHz to 21 kHz. Some modes of the sensitive chip are susceptible to the external vibration, which causes the sensitive chip to resonate and resulting in zero offset error of gyro. The zero offset error of gyro can reach 0.5 (°)/s. In this paper, the mechanism of the modal resonance error of the sensitive chip is analyzed, and proposes a stagger frequency design in structure to avoid the influence of external specific frequency on the sensitive chip, so as to suppress the zero offset error. The zero offset error is reduced to about 0.03 (°)/s, and the adaptability of the gyro to the vibration environment is improved.

An electrostatic driving model of the resonator of hemispherical resonator gyroscopes (HRG) has been established in this paper. The electrostatic driving force of 1/2 times, 1 times, 2 times and higher frequency voltage signals of hemispherical harmonic oscillator is analyzed theoretically. The results show that the obtained hemispherical harmonic oscillator is only sensitive to 1/2 times, 1 times and 2 times of the resonant frequency of hemispherical harmonic oscillator, and is not sensitive to other frequency signals. The magnitude of the force of the driving voltage signal applied in different ways is deduced, which provides a basis for the driving and closed loop circuit design of the hemispherical resonant gyroscope.

The main defect of laser seal welding of hemispherical resonator gyroscope(HRG) is the solidification crack at keyhole. In order to solve the problem of air tightness, on the basis of the theoretical analysis of the welding process and the relevant experimental verification by using the “keyhole effect” of laser welding, the mechanism of “misalignment” structure of welding joint to prevent hot cracks is investigated, and a new welding structure is proposed accordingly.The results show that the crack in the welding joint of new structure is restrained and the air tightness is improved significantly.

The amplitude controlloop of hemispherical resonator gyroscopes(HRG) is used for vibration excitation and amplitude maintenance of HRG. The scale factor of HRG working in force to rebalance (FTR)mode is proportional to the amplitude of vibration. In this paper, the working principle of HRG working in FTR mode is theoretically deduced，Then, it is analyzed that the traditional amplitude control method will change the scale factor of the hemispherical gyroscope due to the influence of external temperature change and aging of electronic components. And finally, the optimization method of HRG amplitude control is proposed, which can greatly reduce the difficulty of realizing the circuit under the condition of achieving the same scale factor stability.

A set of measurement system of scintillator decay time constant is built up based on the principle of delayed coincidence method of single photon technology. Three pieces scintillation crystals of Ce:LYSO and Ce∶LuAG scintillators were selected to measure the decay time. The single exponential fitting of the decay time constant curve obtained from the measurement is carried out. The calculated decay time constant average of Ce∶ LYSO is 43.85 ns; the decay time constant average of Ce∶LuAG is 56.02 ns. The test results of the device are basically consistent with those of other measurement methods at home and abroad.

Since the conventional crystal growth equipment does not have a feeding function, and the raw materials cannot be replenished during the crystal growth process, the final crystal size is usually subjected to the size of the crucible and the equipment, while the cost of larger size crucible and equipment is high, which restricts the research and development of large size crystal.In this paper, an automatic feeding system is designed, which can supply the same mass of raw materials to the crucible according to the quality of the grown crystal, and ensure that the solid liquid interface in the crucible remains unchanged, so as to achieve the goal of growing largesize crystal in a small crucible, improve the utilization rate of equipment, save energy, reduce production costs, and promote the development of largesize crystal.

By imitating the structure of insect receptor, a bionic hair airflow sensor, surface symmetric electrode with metal core polyvinylidene fluoride(PVDF) fiber sensor(SMPF), is designed and fabricated. Based on the theory of hydrodynamics and the first piezoelectric equation, the air flow sensing model of SMPF is established. An experimental system is built to verify the sensing ability of SMPF for airflow velocity. The experimental results show that the output signal of SMPF has a linear relationship with the square of air velocity. The experimental results show that the output signal of SMPF has a linear relationship with the square of the airflow velocity, which validates the theoretical model and shows that SMPF has the ability to sense the airflow velocity.The fibers are arranged in an array row in the wind tunnel flow field, and the fiber array is impacted by the airflow.An experimental system is builtto verify the sensing characteristics of the fibers in the flow field, and a finite element simulation analysis is carried out.The experimental results show that in the wind tunnel device, when there is airflowflowing, a flow boundary layer is generated, the thickness of the boundary layer becomes thicker and thicker along the direction of airflow velocity and the airflow velocity difference on the same cross section is getting larger and larger.The experimental results verify the theoretical model and show that SMPF has the ability to sense the flow field distribution.

The vibration energy exists widely in nature, and the use of intelligent materials to collect vibration energy to power microelectronic systems is a development trend in the field of new energy. In this paper, a kind of MSMA vibration energy harvester based on cantilever beam is designed by using the inverse effect of a new smart material of magnetically controlled shape memory (MSMA).The structure of each part of the collector is analyzed theoretically and designed systematically, and the structure model of the vibration energy harvester is established. The finite element analysis of magnetic field is carried out by using ANSYS software, and it is verified that the magnetic circuit and magnetic induction intensity meet the requirements of vibration energy harvesting. On this basis, a prototype of harvester is developed and tested by setting up an experimental platform. The results show that the cantilever MSMA vibration energy harvester has a wide frequency band of vibration energy acquisition, and the output voltage can reach 220 mV, which provides a reference for the collection and utilization of vibration energy.

The intravascular ultrasound(IVUS) plays a vital role in the diagnosis of cardiovascular disease. However, due to the non uniform rotation commonly existing in the mechanical rotational probe, the imaging quality is reduced. Thus in this paper, the driven motor is placed in the front of the probe to avoid long distance transmission. The diameter of the piezoelectric motor is 1 mm, and the length is 10 mm. The motor has the characteristics of stability and low power consumption, and the speed is high under low voltage driving. The scanning imaging results of the probe are also presented in the article, which shows that this probe has certain feasibility.

The general purposed wideband transducers (including low frequency to high frequency) are generally used in combination with different types of transducers. A single transducer is independently designed and then combined into an array. Its size is large and itsweight is heavy, and its performance specifications are affected after installation, such as the opening angle of the transducer becomes smaller. Based on the analysis of the current research status of broadband transducer at home and abroad, combined with the requirements of small remote operated vehicle (ROV) on the board detection, this paper puts forward the specific design requirementsof the underwater acoustic transducer. The composite rod transducer and several piezoelectric ceramic rings are designed in an open and integrated way. On the basis of meeting the installation requirements of small ROV, the ultra widefrequency band coverage of 3~100 kHz for transmittingand 1~100 kHz for receiving is realized, and the opening angle is not less than 70°. The actual aviation test on the pool and the lake proves that the developed transducer is in line with the simulation design, the actual measurement results are in good agreement with relevant domestic and foreign conclusions, and have extensive engineering practical value.

In this paper, it is proposed to install two single phase transducers(SPTs) with resonance frequency of 1 MHz in parallel on the inclined glass substrate to conduct microliter oil/water mixed drop separation experiments. Combined with the force of oil/water mixed droplets on the inclined substrate, the two dimensional Navier Stokes equation and the sound flow theory were used to establish the droplet motion mechanics model. The variation relationship between the separation time of the microliter oil/water mixed drop and various influencing factors was analyzed. The theoretical analysis and experimental results show that the factors affecting the separation time mainly include the substrate inclination angle, input peak voltage and oil/water mixing ratio. The oil/water mixed droplets can be efficiently separated by adjusting the value of the influence factors. The research method can reduce the cost of traditional oil/water mixed drop separation, and provide a new idea for separating two incompatible microliter mixed droplets.

Based on the modified couple stress theory and Hamilton principle, and combining the classical laminated beam theory, the motion control equations and natural frequencies of micro scale homogeneous and heterogeneous PZT intelligent drivers with laminated structure are derived in considering the mechanical electrical coupling effect. By introducing the intrinsic feature size parameters of materials, the size effect of the micro scale PZT drivers is successfully captured. The numerical analysis results show that different substrate materials have little influence on the normalized natural frequency of micro scale homogeneous and heterogeneous PZT intelligent actuators. With the increase of the thickness of substrate layer, the size effect of micro scale PZT drivers decrease gradually as the thickness of the piezoelectric layer does not change. With the increase of feature size of the PZT structure, the size effect gradually disappears.

Grinding and polishing is an important means of precision finishing in the field of machining. In traditional grinding and polishing, especially when grinding and polishing hard and brittle materials, there are characteristics such as high hardness, low fracture toughness and stable chemical properties. It is difficult to obtain ideal processing efficiency and superior surface quality when grinding and polishing. The piezoelectric ultrasonic assisted grinding and polishing is a kind of vibration grinding technology, which applies ultrasonic vibration grinding technology to the machining process. Its high frequency vibration can reduce the grinding force, improve the processing efficiency, and can give full play to the characteristics of hard grinding process effectively. According to the research status of the characteristics and mechanism of ultrasonic assisted grinding and polishing, the development trends of the ultrasonic assisted grinding and polishing of the hardness and brittle materials at home and abroad are reviewed and prospected.

The quality of cerium bromide (CeBr3) crystal was improved by using the anionic and cationic co doped method. The results show that the defects such as cracking and fluidization can be effectively eliminated by doping F-, and the optical linear output and the energy resolution of the crystal can be improved by doping Sr2+ at the same time. The crystal blank of cerium bromide with 45 mm × 90 mm was grown by Bridgman method, and the doping ratio was 98% CeBr3, 2% SrBr2, 10% CeF3 .The energy resolution of the cut device is 4.0% under the action of 662 keV gamma ray of 137Cs radiation source.

A wind energy conversion device based on a dielectric elastomer array is designed, which includes a windmill, a crankshaft, a dielectric elastomer film, a casing, a bearing, a clamp, a brush, a high voltage generator, a cable, and the like. Among them, the rotating shaft of the windmill is connected with the main journal of the crank connecting rod, the bearing is mounted on the connecting rod journal, the fixture for fixing the dielectric elastic body is located 180° opposite to the outer side of the bearing, and the other side of the dielectric elastic body is also fixed in the outer casing by using the clamp. On the surface, a plurality of connecting rod journals are arranged, and dielectric elastomer power generating units which are always in the same tensile state are connected in parallel to form a group of power generating arrays, so as to increase the single power generation capacity. The device is based on a single dielectric elastomer to form a dielectric elastomer array, which sequentially converts electrical energy in one cycle. The experimental results show that the power generation in a single cycle can reach 17.06 mJ when the material strain reaches 230% and the charging voltage is 925 V. It provides a reference for the application of large scale power generation of dielectric elastomer arrays.

In response to the requirements of micro nano manipulating technology for large stroke, high precision, multi degree of freedom and output displacement decoupling of micro motion stage, a xy two degree of freedom two way driven micro motion stage based on two stage amplification mechanism is designed. The motion and amplification principle of the micro motion stage were analyzed, and the theoretical models and finite element models of the micro motion stage were established and tested. The test results of the stage output characteristics showed that the magnification of the micro motion stage can be up to 8.5 times, the error with the simulation value is 6.9%,and the coupling displacement is controlled within 0.82%. The stage was driven by a 150 V triangle wave signal, and the positive and negative output displacements in the x direction are 84.6 μm and -84.2 μm respectively, and the positive and negative output displacement in the y direction are 85.0 μm (-84.5 μm respectively. The maximum displacement at different frequencies fluctuates only in a very small range, and the positive/negative outputs in x and y directions have high similarity and stability. The targets of two way driving, large stroke, and high precision have been realized.

The hysteresis characteristics of piezoelectric actuators will affect the positioning accuracy of the micro operating system. A Hammerstein like model is proposed to describe the hysteresis characteristics of piezoelectric actuators. Firstly, a modified dynamic hysteresis operator(MDHO) is proposed. By adding the offset, dead zone width and slope in the operator, the height and width of the hysteresis can be adjusted to reflect the asymmetry and rate correlation of hysteresis. Then the modified hysteresis operator is used to represent the static nonlinear part. The parameters and weights of the hysteresis operator can be adjusted online to adapt to changes in external conditions. The input autoregressive model is used to represent the dynamic linear part; a Hammerstein like model that can describe the rate dependent hysteresis characteristics of piezoelectric actuators is established. Finally, the parameters in the model are identified by the least squares method, matrix expansion, and matrix singular value decomposition in turn and the identified parameters were proved to be unbiased estimates. The effectiveness of the proposed modeling method is verified by experiments.

A SINS/GPS online alignment method based on the square root cubature Kalman filter and initial attitude estimation algorithm is proposed in this paper. The square root cubature Kalman filter is constructed to handle the nonlinear measurement model of the initial attitude which is represented with Rodrigue parameter, and the attitude transformation matrix at the current time is obtained. The semi physical simulations of the guided weapon and the vehicle system are carried out. The results show that the online alignment can be finished within 25 s with the proposed method.The simulation results of short range guided weapon show that the yaw and pitch angle errors are within 0.1° and the roll angle errors are within 0.3°. The simulation results of low cost vehicle navigation system show that the yaw angle errors are within 0.2° and the pitch and roll angle errors are within 1°, which can meet the alignment requirements of guided weapons and low cost civil vehicles.

The phase shifter is the core component of Fizeau interferometer and the key component is piezoelectric ceramic actuator. However, the piezoelectric ceramic actuator has hysteresis and nonlinear characteristics which seriously affects the precision of the phase shifter and adversely affects the surface shape detection of optical components. Therefore, a control system of PZT is designed, which uses the National Instruments (NI) dynamic data acquisition equipment (PCIe 6321), LabVIEW system and voltage amplifier to form a voltage drive system to generate drive signals, and uses the resistance strain gauge and Wheatstone bridge as the displacement sensor to collect the displacement. Secondly, a polynomial model is established and a feedforward open loop correction algorithm based on the PZT transfer function are proposed to model and correct the PZT. Finally, the algorithm was verified on the experimental system. The experimental results show that the phase shift error of the phase shifter can be improved, and the difference between uncorrected and corrected displacement is less than 10% .The system can effectively correct the hysteresis nonlinear characteristic of piezoelectric ceramic actuator, so as to reduce the influence of nonlinear phase shift on the measurement results and meet the high precision requirements of detecting optical element surface shape and system.

It is of great practical significance to make use of the inverse magnetostrictive effect of Galfenol and adjust the band gaps of its phononic crystal(PC) through the shunt element to achieve effective vibration reduction. Based on the magnetostrictive constitutive equations, Armstrong model, Faraday law, transfer matrix method and Bloch theorem, the effective elastic modulus expression of Galfenol with shunt circuit is derived and the vibration model of the PC is established. The comparisons between the calculated and measured results show that the proposed model can provide a reasonable data trend of the effective elastic modulus with the change of frequency and shunt capacitance, and can predict the nonlinear behaviors of Galfenol parameters with the change of the stress. The variation of the peak value of the Bragg band gap(BBG) attenuation constant and the cutoff frequency of the PC under open circuit with stress is analyzed, and the optimal operating point for vibration reduction is determined. The characteristics of BBG, resonance band gap(RBG) and resonance common band gap(RCBG) of the PC under different shunt capacitance and stress are analyzed. The results show that smaller shunt capacitance, larger magnetomechanical coupled factor and larger inductance can significantly improve the vibration reduction performances of the PC.

Aiming at the inaccurate data modeling of MEMS gyroscope or the inability to give a model, a method to reduce the noise of gyroscope data by BP neural network (BPNN) assisted Kalman filtering is proposed in this paper. Analysis of the systematic noise variance Q of the Kalman filter shows that when the model is not accurate, it can be compensated by Q. Based on the principle of BP neural network to optimize Q value, the acquired MEMS gyroscope data were input into the Kalman filter to obtain Q firstly. Then the innovation, filter gain and measurement noise variance are input into the neural network, and Q is used as the output of the neural network. The system noise covariance matrix is optimized by the neural network to obtain Q*. And finally Q* is used as the noise variance matrix of the Kalman filter system. The experimental results show that the method can effectively improve the accuracy of the gyroscope in the case of inaccurate modeling.