Acta Photonica Sinica, Volume. 43, Issue 4, 422005(2014)
Design and Analysis of a Precision Axial Adjusting Mechanism for Optical Elements in Lithographic Lens
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PENG Hai-feng, SUN Zhen. Design and Analysis of a Precision Axial Adjusting Mechanism for Optical Elements in Lithographic Lens[J]. Acta Photonica Sinica, 2014, 43(4): 422005
Paper Information
Received: Jul. 31, 2013
Accepted: --
Published Online: May. 4, 2014
The Author Email: Hai-feng PENG (kedapeng1986@163.com)
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