LiNbO<sub>3</sub> channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Sumei Wang; Jinhua Zhao; Jinjun Gu; Mingyang Bu; Li Fan; Shuang Li; Xifeng Qin; Yicun Yao; Yingying Ren; Lei Wang

doi:10.3788/COL202220.071301

Chinese Optics Letters, Volume. 20, Issue 7, 071301(2022)

LiNbO₃ channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing

Sumei Wang¹, Jinhua Zhao^1、*, Jinjun Gu¹, Mingyang Bu¹, Li Fan¹, Shuang Li¹, Xifeng Qin¹, Yicun Yao², Yingying Ren³, and Lei Wang⁴

Author Affiliations

¹School of Science, Shandong Jianzhu University, Jinan 250101, China

²Shandong Key Laboratory of Optical Communication Science and Technology, School of Physical Science and Information Technology, Liaocheng University, Liaocheng 252059, China

³Shandong Provincial Engineering and Technical Center of Light Manipulations & Shandong Provincial Key Laboratory of Optics and Photonic Device, School of Physics and Electronics, Shandong Normal University, Jinan 250014, China

⁴School of Physics, Shandong University, Jinan 250100, China

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Sumei Wang, Jinhua Zhao, Jinjun Gu, Mingyang Bu, Li Fan, Shuang Li, Xifeng Qin, Yicun Yao, Yingying Ren, Lei Wang. LiNbO₃ channel and ridge waveguides based on helium ion implantation combined with lithography and precise diamond dicing[J]. Chinese Optics Letters, 2022, 20(7): 071301

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Paper Information

Category: Integrated Optics

Received: Feb. 7, 2022

Accepted: Apr. 18, 2022

Published Online: May. 7, 2022

The Author Email: Jinhua Zhao (zhaojinhua@sdjzu.edu.cn)

DOI:10.3788/COL202220.071301

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology